5nm

Xiaokun Yang1, Rui He1,2, Zheyi Lu1

  • 1Key Laboratory for Micro-Nano Optoelectronic Devices of Ministry of Education, School of Physics and Electronics, Hunan University, Changsha, China.

Nature communications
|September 3, 2024
PubMed
概括

一种新的层次传输工艺使得使用氧化 (IGZO) 可扩展制造超短通道垂直场效应晶体管 (VFET). 这种方法显著提高了设备的性能,并为先进的超薄垂直电子提供了途径.

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