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Updated: Jun 14, 2025

Generation and Coherent Control of Pulsed Quantum Frequency Combs
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基于高斯混合模型的基于压力的MFCs的PI增强调整.

Seiji Higuchi1, Takayuki Ueda1, Kotaro Takijiri1

  • 1HORIBA STEC, Co., Ltd., Research & Development Division, Kyoto, 601-8116, Japan.

Scientific reports
|September 4, 2024
PubMed
概括

本研究介绍了一种简单的高斯混合模型 (GMM) 和直接反向分析方法,用于调整质流控制器 (MFC) 中的比例积分 (PI) 收益. 这种方法大大减少了调整代,以实现高效的半导体制造.

关键词:
高斯混合物模型模型的高斯混合物模型.制造业 制造业 制造业 制造业质流控制器 质流控制器检查人员控制PI的控制一个半导体半导体.

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