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原子分辨率的真实空间倾斜方法 STEM成像纳米晶体材料的成像

Jiake Wei¹, Zhangze Xu^1,2, Wenjie Shen¹

¹State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian, 116023, China.

|September 9, 2024

概括

一种新方法使用Ronchigrams中的影子图像分析,用于在扫描传输电子显微镜 (STEM) 中精确的样本倾斜. 这种技术对纳米晶体材料有效,可在低剂量条件下实现自动化原子分辨率成像.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
电子显微镜电子显微镜

背景情况:

原子分辨率扫描传输电子显微镜 (STEM) 依赖于精确的样本倾斜到高对称区域轴.
传统的倾斜方法使用衍射模式,这对于小纳米晶体材料来说往往太微弱了.

研究的目的:

为STEM开发一种简单,有效和自动化的倾斜方法,可以克服微弱衍射模式的局限性.
为了实现精确的区域轴对齐,用于纳米晶体和光束敏感材料的原子尺度表征.

主要方法:

一种基于分析伦奇图像中阴影图像的衍射对比变化的新型倾斜方法.
从影子图像的最低强度位置计算样本误导.
自动倾斜与显微镜脚本集成,用于低剂量条件 (<0.17 e− Å−2 s−1).

主要成果:

该方法准确地确定误导角度,纠正偏差大于±6.9°的偏差,准确度低于mrad.
在真实空间中运行,不需要记录微弱的衍射模式.
成功演示了自动化的区域轴倾斜,用于热带敏感材料,如地质石和金属有机框架.

结论:

这种基于真实空间影像的倾斜方法显著提高了对纳米晶体和光束敏感材料的原子分辨率STEM的可行性.
自动化低剂量倾斜程序促进了详细的表征,推进了纳米级材料科学.

关键词:

分散对比度差异差异差异差异差异差异差异差异差异差异差异.低剂量的低剂量纳米晶体材料是一种纳米材料.扫描传输电子显微镜扫描传输电子显微镜倾斜倾斜的倾斜是一种倾斜.

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