和离子诱导的电子和离子信号用于扫描离子显微镜应用
Yang Li1, Sheng Xu1,2, Thomas H Loeber3
1Department of Applied Physics and Science Education, Eindhoven University of Technology (TU/e), P.O. Box 513, Eindhoven 5600 MB, The Netherlands.
概括
使用超冷卢比 (Rb+) 和 (Cs+) 原子的新型聚焦离子束 (FIB) 系统显示,与 (Ga+) FIB系统相比,二次电子成像的信号噪声比率更高.
科学领域:
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
- 表面科学是一门学科.
背景情况:
- 聚焦离子束 (FIB) 显微镜对于材料的表征至关重要.
- 目前的FIB系统主要使用 (Ga+) 离子.
- 探索替代性离子源对于推进成像能力至关重要.
研究的目的:
- 研究使用超冷的 (Rb) 和 (Cs) 原子的新型聚焦离子束 (FIB) 系统的应用.
- 将Rb+和Cs+ FIB系统的成像性能与传统的Ga+ FIB系统进行比较.
- 评估Rb+和Cs+对于增强扫描离子显微镜的优点.
主要方法:
- 利用离子诱导的电子和离子产量来分析FIB系统的性能.
- 对Rb+,Cs+和商用Ga+ FIB系统进行了比较测量.
- 在各种纯元素目标上检查了二次电子 (SE) 产量和离子诱导的离子信号.
主要成果:
- 与Ga+ FIB系统相比,Rb+和Cs+ FIB系统在不同目标上显示出更高的二次电子 (SE) 产量.
- 增强的SE产量表明,在SE成像中具有Rb+/Cs+的SE成像中,信号噪声比可能更高.
- 对离子诱导的离子信号的分析表明,二次离子主导了Cs+信号,而Rb+和Ga+信号含有更多的反散离子.
结论:
- 超冷Rb+和Cs+FIB系统在二次电子成像中比Ga+FIB具有显著的优势,因为产量更高.
- Rb+和Cs+ FIB系统有潜力提高信号噪声比率,从而实现更详细的表面分析.
- 了解离子诱导的离子信号 (二次与反向散射) 的差异是优化FIB应用的关键.
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