对具有基板约束的薄膜确定压电系数的分析和准则
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|September 12, 2024
概括
基板效应显著影响压电薄膜测量. 优化材料特性,电极大小和测试频率对于准确的压电系数确定至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 物理 物理学 物理
背景情况:
- 压电薄膜对于机电设备至关重要,需要精确的性能测量.
- 基质约束可能会影响压电系数测量的准确性和可靠性.
研究的目的:
- 识别和分析影响压电薄膜性能测量的因素.
- 为准确和可靠的压电系数测量提供准则.
主要方法:
- 理论上的有限元素分析 (FEA).
- 实验验证的验证.
- 已建立的压电测量方法的比较.
主要成果:
- 影响测量准确性的关键因素包括基板与薄膜的Young模量比,电极尺寸与基板厚度比以及测试频率.
- 较低的基板模量和较大的电极对基板厚度比率增加了曲效应和潜在的误差.
- 高测试频率可能会导致不可靠的横向位移波动.
结论:
- 了解基板效应对于准确的压电薄膜表征至关重要.
- 已建立的指导方针将提高电子机械材料和设备的压电系数测量的可靠性.
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