开放通道腔环向下的光谱仪,用于在洁净室环境中同时检测化和颗粒
Muhammad Bilal Khan1, Christian L'Orange1, Cheongha Lim2
1Department of Mechanical Engineering, Colorado State University, Fort Collins, CO 80525, USA.
Sensors (Basel, Switzerland)
|September 14, 2024
概括
这项研究引入了一种紧的激光传感器,用于检测空气中的分子污染物,如化 (HCl) 和清洁室中的颗粒. 先进的传感器为关键的半导体制造环境提供高灵敏度.
科学领域:
- 环境科学 环境科学
- 分析化学 分析化学
- 半导体制造业 半导体制造业
背景情况:
- 清洁室环境对于半导体制造至关重要,需要精确监测空气中的污染物.
- 空气中的分子污染物 (AMC),如化 (HCl),可以降低设备和产品的产量.
- 微粒对敏感的制造工艺也构成重大风险.
研究的目的:
- 开发清洁室中粒子和AMC的先进监测技术.
- 为了量化颗粒量和化 (HCl) 度.
- 为了实现高灵敏度检测,提高半导体制造完整性.
主要方法:
- 开发一个使用开放通路腔环向下光谱 (CRDS) 的紧激光传感器.
- 使用1742nm近红外二极管激光器通过其2-0振动频段检测HCl.
- 分析Mie散射诱导的环下降时间波动,用于粒子量化.
主要成果:
- 在15分钟内实现了高灵敏度检测HCl,艾伦偏差为0.15ppb.
- 在密度低至~10^5 m^-3 (直径>1 μm) 的粒子检测中使用环向下分布的统计时刻进行了证明.
- 验证了传感器同时检测AMC和粒子的能力.
结论:
- 开发的CRDS传感器为先进的洁净室监测仪器提供了基础.
- 未来的发展可能会导致紧的移动平台,用于对AMC和颗粒的晶圆级监测.
- 这项技术提高了半导体制造工艺的完整性和效率.
关键词:
在AMC中,AMC是AMC.在CRDS中,使用CRDS是必要的.HCl HCl 的含量是什么空气中的分子污染物.腔圈下降光谱学 腔圈下降光谱学清洁室是一个干净的房间.污染污染污染的污染是什么化的化是一种开放的路径 开放的路径颗粒颗粒的粒子是什么更多相关视频
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