用于恶劣环境的MEMS振动内部环陀螺仪的设计和建模
Waqas Amin Gill1, Ian Howard1, Ilyas Mazhar1
1Department of Mechanical Engineering, Curtin University, Perth, WA 6845, Australia.
Sensors (Basel, Switzerland)
|September 14, 2024
概括
对内部微电机系统 (MEMS) 振动环陀螺仪的两种新设计进行了针对恶劣环境的分析. 设计II,具有更多的支弹,在高温和太空应用中展示了卓越的模式匹配和热稳定性.
科学领域:
- 机械工程 机械工程
- 航空航天工程 航空航天工程
- 材料科学 材料科学 材料科学
背景情况:
- MEMS振动环陀螺仪对于惯性导航至关重要.
- 恶劣的环境条件对陀螺仪的性能构成重大挑战.
- 优化陀螺仪设计对于在极端环境下可靠运行至关重要.
研究的目的:
- 为恶劣环境设计,建模和比较分析两个内部MEMS振动环陀螺仪.
- 调查支弹配置对陀螺仪性能的影响.
- 为了评估高温应用的热稳定性和模式匹配.
主要方法:
- 使用Ansys 2023 R1软件进行有限元分析 (FEA).
- 用于动态行为分析的运动方程的详细导出.
- 在不同的条件下进行静电,模态和波分析.
主要成果:
- 设计II,具有16个半圆形支弹,比设计I (八个弹) 显示出更好的模式匹配和更高的共振频率.
- 设计II在-100°C至100°C的温度范围内表现出卓越的热稳定性.
- 这两种设计在不同的直流电压和环境条件下都表现出了强度.
结论:
- 内部MEMS振动环陀螺仪设计适用于恶劣的环境,包括高温和太空应用.
- 设计II提供了增强的性能特性,使其成为极端环境的有希望的候选人.
- 进一步的研究可以探索先进的材料和配置,以获得更大的强度.
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