基于A1模式酸薄膜共振器的6GHz羔羊波声波过器,带有支架形电极
Xin Tong1, Yang Zou1, Zhiwei Wen1
1The Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, Wuhan, China.
Microsystems & nanoengineering
|September 19, 2024
概括
在羔羊波共振器中,新的检查器形互数字电极使下一代Wi-Fi 6E过器成为可能. 这些设备实现高频率和宽带宽,具有出色的带外排斥,克服了传统设计的局限性.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 物理 物理学 物理
背景情况:
- 使用Z切割酸 (LiNbO3) 薄膜的第一阶反对称 (A1) 模式羔羊波共振器 (LWR) 是可重新配置过器的有希望的.
- 在LWR过器中,传统的数字间电极 (IDT) 难以获得清洁的频谱响应和足够的带外 (OoB) 排斥.
研究的目的:
- 设计和演示符合Wi-Fi 6E标准的LWR过器,使用新的检查器形IDTs.
- 为了抑制更高层次的虚假模式,并提高过器性能,用于超高频应用.
主要方法:
- 在Z切割的LiNbO3薄膜上制造6GHz共振器与支票形IDT.
- 虚假模式抑制,阻抗响应和功率图 (FOM) 的表征.
- 实现电容-感应匹配网络,用于阻抗匹配和声电电磁 (EM) 多物理模拟.
主要成果:
- 检查器形IDT成功地抑制了更高阶A1虚假模式,实现了无虚假阻抗响应.
- 在共振器中达到104的高FOM.
- 制造过器显示中心频率>6GHz,3dB带宽>620MHz,OoB排斥>25dB.
- 证明了出色的50 Ω阻抗匹配与电压静电波比 (VSWR) <2.
结论:
- 支票形IDT为高性能LWR过器提供了可行的解决方案,克服了传统设计的局限性.
- 开发的过器适用于超高频和超宽带应用,特别是Wi-Fi 6/6E.
- 这项工作为下一代无线通信系统中先进的过器设计提供了基础.
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