Jove
Visualize
联系我们
JoVE
x logofacebook logolinkedin logoyoutube logo
关于 JoVE
概览领导团队博客JoVE 帮助中心
作者
出版流程编辑委员会范围与政策同行评审常见问题投稿
图书馆员
用户评价订阅访问资源图书馆顾问委员会常见问题
研究
JoVE JournalMethods CollectionsJoVE Encyclopedia of Experiments存档
教育
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab Manual教师资源中心教师网站
使用条款与条件
隐私政策
政策

相关概念视频

您也可能阅读

相关文章

通过共同作者、期刊和引用图与本文相关的文章。

排序
Same author

Fluorescent carbon dot-based biosensor for the rapid and sensitive detection of Escherichia coli DNA.

Scientific reports·2026
Same author

A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability.

Microsystems & nanoengineering·2026
Same author

A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio.

Microsystems & nanoengineering·2026
Same author

A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study.

Microsystems & nanoengineering·2026
Same author

DERMIS: End-to-End Design of a Fully Integrated Large-Area Grasp-State-Adaptive Tactile Sensor System on a-IGZO TFT.

IEEE transactions on biomedical circuits and systems·2026
Same author

A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing.

Microsystems & nanoengineering·2025

相关实验视频

Updated: Jun 12, 2025

An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging
16:01

An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging

Published on: September 24, 2017

10.4K

灵活的基于 PZT 的行列定位的 2D PMUT 数组.

Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft

    IEEE transactions on ultrasonics, ferroelectrics, and frequency control
    |September 23, 2024
    PubMed
    概括
    此摘要是机器生成的。

    这项研究介绍了一种灵活的压电微机超声传感器 (PMUT) 阵列,采用自上而下的方法制造. 该设备显示了可穿戴应用的潜力,即使在曲下也表现出良好的性能.

    更多相关视频

    A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
    10:40

    A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

    Published on: April 8, 2018

    8.2K
    Easy and Accurate Mechano-profiling on Micropost Arrays
    10:25

    Easy and Accurate Mechano-profiling on Micropost Arrays

    Published on: November 17, 2015

    11.1K

    相关实验视频

    Last Updated: Jun 12, 2025

    An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging
    16:01

    An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging

    Published on: September 24, 2017

    10.4K
    A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
    10:40

    A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

    Published on: April 8, 2018

    8.2K
    Easy and Accurate Mechano-profiling on Micropost Arrays
    10:25

    Easy and Accurate Mechano-profiling on Micropost Arrays

    Published on: November 17, 2015

    11.1K

    科学领域:

    • 材料科学与工程 材料科学与工程
    • 纳米技术和微系统
    • 声学和超声波的研究.

    背景情况:

    • 灵活的压电微机超声传感器 (PMUT) 对于先进的传感应用至关重要.
    • 现有的制造方法往往缺乏可穿戴设备的可扩展性或灵活性.
    • 开发强大和高效的灵活PMUT阵列对于下一代技术至关重要.

    研究的目的:

    • 报告一个新的行列 (RC) 解决灵活的PMUT数组.
    • 为了展示适合灵活超声波设备的自上而下的制造工艺.
    • 为潜在的可穿戴应用描述灵活PMUT阵列的性能.

    主要方法:

    • 使用了自上而下的制造工艺,涉及临时载波晶圆和深度反应离子蚀刻 (DRIE).
    • 采用sol-gel加工的硫酸酸 (PZT) 薄膜 (0.8μm) 作为活性压电材料.
    • 整合了14微米聚胺被动层,并使用反应性离子蚀刻 (RIE) 制造了侧壁.

    主要成果:

    • 通过激光多普勒振动计 (LDV) 测量的2.7MHz (在空中) 和2.1MHz (在水下) 的共振频率.
    • 在空气中表现出1.2nm/V的灵敏度,具有5V直流偏差.
    • 在1厘米处测量了40Pa/V的水下压力响应,具有10V直流偏差.

    结论:

    • 制造的灵活的PMUT阵列表现出有希望的性能特征.
    • 该设备在曲时 (8毫米半径) 保持功能,表明它适用于可穿戴应用.
    • 建议进一步优化,以提高浅深水下传感的性能.