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Updated: Jun 12, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Published on: April 13, 2016

使用微线结构进行X射线3D显微镜的放大校准

Yasushi Azuma¹, Kazuhiro Kumagai^1,2, Naoki Kunishima³

¹National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan.

Microscopy (Oxford, England)

|September 24, 2024

概括

这项研究对量化测量进行了三维X射线显微镜 (3DXRM) 的校准. 使用扫描电子显微镜 (SEM) 评估线结构,获得了1.01的放大校准系数,使SI可追溯测量.

科学领域:

计量学计量学计量学
材料科学材料科学材料科学
图像技术技术的成像技术

背景情况:

三维X射线显微镜 (3DXRM) 是一种强大的非破坏性成像技术,用于亚微米尺度结构分析.
目前的3DXRM应用主要是观测性的,由于缺乏校准,限制了其在定量评估和质量控制中的使用.
精确的测量需要校准可追溯到国际单位系统 (SI).

研究的目的:

建立一个用于定量测量的3DXRM放大校准的方法.
为了验证3DXRM校准的原型标准样品 (线条结构).
评估为3DXRM创建一个SI可追溯的校准系统的可行性.

主要方法:

作为3DXRM放大校准的原型标准样本的制造线结构 (LS).
使用校准的横截面扫描电子显微镜 (SEM) 评估了LS的间隔.
将SEM和3DXRM评估结果进行比较,以确定放大校准因子.

主要成果:

根据SEM评估的LS间隔,为3DXRM确定了1.01的放大校准系数.
这些LS被验证为适合3DXRM校准的标准样本.
该研究证明了SI可追溯的3DXRM放大校准的可行路线.

结论:

开发的方法可以通过SI可追溯放大校准使用3DXRM进行定量测量.
这一进步显著提高了3DXRM在质量控制和计量学中的实用性.
这些发现为3DXRM在精密测量应用中的更广泛采用铺平了道路.

关键词:

在X射线显微镜中使用X射线显微镜.计算机断层扫描 (CT) 是一种计算机断层扫描.放大的校准校准.扫描电子显微镜扫描电子显微镜标准化标准化标准化

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