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Updated: May 23, 2026

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声传输测量用于提取复杂的3D MEMS传感器的机械性能

Dennis Becker1, Moritz Littwin1, Achim Bittner1

  • 1Hahn-Schickard, Wilhelm-Schickard Straße 10, 78052 Villingen-Schwenningen, Germany.

Micromachines
|September 28, 2024
PubMed
概括

一种新的被动测量技术准确地描述了声学MEMS传感器中的侧向振动. 这种方法避免了破坏性样本准备,改善了微电机系统 (MEMS) 的机械性质分析.

关键词:
在 MEMS 传感器中使用.声学传输的声音传输.标志性特征的描述.折叠的隔膜膜是一个折叠的隔膜.建模建模是什么意思

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Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over short distances...