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相关概念视频

Preparation of Samples for Electron Microscopy01:20

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To be visualized by an electron microscope, either transmission or scanning, biological samples need to be fixed (stabilized) so the electron beam does not destroy them and dried thoroughly (desiccated/dehydrated) so the vacuum does not affect them. Fixation needs to be done as quickly as possible because the sample properties will start changing as soon as it is removed from its natural environment. For example, in a tissue sample, the oxygen levels begin decreasing, causing an altered...
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相关实验视频

Updated: Jun 11, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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包装RF MEMS开关中的温度效应,采用优化黄金电工艺.

Lifeng Wang1, Lili Jiang1,2, Ning Ma1

  • 1Key Laboratory of MEMS of the Ministry of Education, School of Electronic Science & Engineering, Southeast University, Nanjing 210096, China.

Micromachines
|September 28, 2024
PubMed
概括

这项研究优化了用于射频微电子机械系统 (RF MEMS) 开关的金电,提高了它们的可靠性和性能. 这项研究揭示了温度如何影响开关.

关键词:
射频MEMS开关是一个RF开关.黄金电工艺过程中的黄金电.终身使用时间 终身使用时间拉入电压的拉入电压.温度影响 温度影响 温度影响

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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相关实验视频

Last Updated: Jun 11, 2025

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科学领域:

  • 材料科学 材料科学 材料科学
  • 电气工程 电气工程
  • 机械工程 机械工程

背景情况:

  • 电金对于射频微电子机械系统 (RF MEMS) 开关至关重要,因为它具有优越的电气,机械和热性能.
  • 优化电工艺是提高这些开关可靠性和性能的关键.

研究的目的:

  • 研究工艺条件对黄金电质量和增长速度的影响.
  • 确定用于RF MEMS应用的金电的最佳参数.
  • 为了分析密封包装的RF MEMS开关的温度依赖性能.

主要方法:

  • 研究了工艺参数对黄金电质量和增长率的影响.
  • 优化电金层的特点是表面粗性和热稳定性.
  • 使用优化过程制造和密封包装的RF MEMS开关.
  • 研究工作温度对机械 (引入电压,寿命) 和射频 (插入损失,隔离) 性能的影响.

主要成果:

  • 优化的黄金电工艺产生了一层表面粗度小和优异的热稳定性.
  • 制造的RF MEMS开关在优化后显示了改进的特性.
  • 温度显著影响包装开关的机械和射频性能,影响拉入电压,寿命,插入损失和隔离.

结论:

  • 优化的金电工艺适合制造可靠的射频MEMS开关.
  • 了解和减轻温度影响对于确保包装射频MEMS开关的环境适应性和一致性能至关重要.