RF MEMS,

Lifeng Wang1, Lili Jiang1,2, Ning Ma1

  • 1Key Laboratory of MEMS of the Ministry of Education, School of Electronic Science & Engineering, Southeast University, Nanjing 210096, China.

Micromachines
|September 28, 2024
PubMed
概括

这项研究优化了用于射频微电子机械系统 (RF MEMS) 开关的金电,提高了它们的可靠性和性能. 这项研究揭示了温度如何影响开关.