基于GaN的MIS-HEMT上的质子辐射效应和可靠性
Zixin Zhen1, Chun Feng2, Hongling Xiao2
1China Aerospace Science & Industry Corp Defense Technology R&T Center, Beijing 1000854, China.
Micromachines
|September 28, 2024
概括
双层介电 (SiNx/Al2O3) 金属绝缘体-半导体高电子移动性晶体管 (MIS-HEMT) 显示出优越的质子辐射可靠性. 这种先进的门结构最大限度地降低了材料和电气性能退化,提高了辐射弹性.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体设备物理 半导体设备物理
- 辐射的影响 辐射效应
背景情况:
- 高电子移动性晶体管 (HEMT) 对于高频应用至关重要.
- 质子辐射可以降低半导体设备的性能.
- 在HEMT中的介电层显著影响设备的可靠性.
研究的目的:
- 为了评估二层介电体 (SiNx/Al2O3) 的质子辐射可靠性,MIS-HEMT.
- 为了比较其与Schottky门HEMT和单介电层MIS-HEMT的性能.
- 为了确定介电选择对质子辐射下的材料和电降解的影响.
主要方法:
- 设备模拟以评估材料缺陷的产生.
- 基于实验和模拟的直流和射频电气性能分析.
- 在质子辐射下对四个HEMT结构进行比较研究.
主要成果:
- 双层介电MIS-HEMT表现出最少的结构材料降解和最少的辐射引起的缺陷.
- 这些设备显示了最小的门电压,电流和传导率 (Gm) 降解率.
- 双层结构保持了最高的切断频率,并且在这个参数中显示了最低的降解.
结论:
- 与其他结构相比,SiNx/Al2O3双层介电 MIS-HEMT 具有优越的辐射抗性.
- 结合Al2O3的高位移能量和SiNx的被动性质,提高了质子辐射的可靠性.
- 双层介电HEMT是辐射硬化电子设备的有希望的解决方案.
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