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Updated: May 6, 2026

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集成的无形碳膜温度传感器与加速器集成到MEMS传感器中.

Qi Zhang1, Xiaoya Liang1, Wenzhe Bi1

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Micromachines
|September 28, 2024
PubMed
概括

无形碳薄膜提供卓越的温度传感. 将这些片与MEMS加速度计集成,可以创建一个高性能,经济的温度和加速度测量传感器.

关键词:
在MEMS MEMS中使用.耐温度特性 耐温度特性无形碳膜是一种无形的碳膜.集成传感器集成传感器加速器是一种加速器.

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