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基于光电子和图像集成方法的微尺度的高精度测量
Yanlong Zhu1,2, Yinbao Cheng1, Hongtang Gao2
1College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China.
Micromachines
|September 28, 2024
概括
本研究介绍了一种集成的光电子和基于图像的系统,用于高精度的微观尺度测量. 这种新型系统为各种微尺度需求提供了可适应性校准,确保了准确和高效的测量.
科学领域:
- 计量学 计量学 计量学
- 光电学是指光电子产品.
- 图像处理 图像处理
背景情况:
- 传统的微尺度检测系统对各种校准要求的适应性有限.
- 现有的方法很难满足不同微尺度的各种校准需求.
研究的目的:
- 开发一种高精度的微尺度测量方法,使用集成的光电子和图像技术.
- 解决单一检测系统的局限性,并实现多样化的校准.
主要方法:
- 一个自动测量和处理系统,集成光电信号和光电图像方法.
- 研究了线性导体上的平滑运动和干扰长度测量的等号误差减小.
- 开发了基于图像的线路定位与边缘和中心识别算法.
主要成果:
- 光电信号方法实现了0.105μm的最大差异和0.068μm的标准不确定性,用于1毫米的微尺度.
- 图像测量方法的准确性与光电信号方法的准确性相当.
- 综合系统中的两种方法都显示出良好的一致性,正常化误差小于1.
结论:
- 集成的光电子和图像测量系统为微尺度校准提供了高精度和广泛的适应性.
- 光电信号方法在效率和准确性方面表现出色,而图像方法提供2D测量功能.
- 这种综合方法克服了单个方法的局限性,使得多功能微尺度计量学成为可能.
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