一个低相动MEMS振荡器与中央定压电共振器用于广泛的温度范围实时时钟应用程序
概括
本研究介绍了用于实时时钟 (RTC) 应用的新型压电MEMS振荡器,在广泛的温度范围内提供稳定的性能. 这些低功耗设备的性能优于现有的MEMS RTC振荡器,非常适合便携式电子设备.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 固态物理 固态物理
- 电气工程 电气工程
背景情况:
- 实时时钟 (RTC) 应用需要稳定且低功率的振荡器.
- 现有的MEMS RTC振荡器在广泛的温度范围内表现方面存在局限性.
- 压电MEMS共振器为高性能定时解决方案提供了潜力.
研究的目的:
- 开发和描述RTC应用的原型温度补偿压电MEMS振荡器.
- 为了评估振荡器在广泛的温度范围内 (-40°C至125°C) 的性能.
- 为了与商用MEMS RTC振荡器进行性能比较.
主要方法:
- 设计和制造带有中心固定的AlN-on-Si压电MEMS共振器.
- 实施温度补偿技术,以保持频率稳定.
- 振荡器输出的特征,包括频率稳定性,功耗和集成相位震荡 (IPJ).
- 晶圆级包装 (WLP) 封装和没有封装的共振器的比较.
主要成果:
- 原型振荡器在广泛的温度范围内稳定运行在约497kHz.
- 在低功耗的情况下实现了5000ppm的宽频调范围.
- 已证明集成相位震荡 (IPJ) 优于最好的商用MEMS RTC振荡器.
- 在封闭和未封闭的WLP MEMS共振器之间,性能保持一致.
结论:
- 开发的压电MEMS振荡器适用于高性能,低功耗的RTC应用.
- 广泛的温度范围操作和卓越的动性能使它们成为便携式设备的理想选择.
- 晶圆级包装显示出对强大和高性能MEMS RTC振荡器集成的承诺.
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