开发了一种高精度的长轨形状仪,使用剪切测量
Xiaowen Cui1,2, Ming Wu1,2, Han Dong1,2
1Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China.
The Review of scientific instruments
|October 9, 2024
概括
这项研究引入了一种新的使用剪切测量技术的长轨迹分析仪,以准确测量大规模的表面形状. 该系统弥补了距离错误,实现了光学测试的高精度.
科学领域:
- 光学计量学是指光学计量学.
- 精密工程是指精密的工程.
- 表面表征表征表征的表征表征.
背景情况:
- 折射计造型仪在扫描大规模表面测量时面临着斜率误差的挑战.
- 由于光学不完美造成的系统错误会对测量准确性产生重大影响.
研究的目的:
- 介绍一款使用剪切测量技术的新型长轨形状仪 (LTP).
- 为了解决和弥补大规模表面形状测量中的斜率错误.
- 通过保持光学头和测试镜之间固定距离来最大限度地减少系统错误.
主要方法:
- 采用两种独立的气轴承车辆进行剪切和扫描运动的剪切测量技术的实施.
- 使用双剪法测量方法与低空间频率过相结合.
- 进行模拟研究以评估减少错误的策略.
主要成果:
- 双剪法与低通过有效地减少了由空气轴承不稳定造成的高频角误差.
- 用平面镜进行的实验测试表明,测量精度低于50 nrad的平方根平均值 (rms).
- 系统设计尽量减少由光学设备缺陷引起的错误.
结论:
- 开发的采用剪切技术的长轨迹分析仪为准确的大规模表面形状测量提供了强大的解决方案.
- 该系统有效地弥补了音调错误,并最大限度地减少了环境和仪器的影响.
- 达到50 nrad rms以下的精度验证了系统在苛刻的光学应用中的性能.
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