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相关概念视频

Phase Contrast and Differential Interference Contrast Microscopy01:26

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Phase-Contrast Microscopes
In-phase-contrast microscopes, interference between light directly passing through a cell and light refracted by cellular components is used to create high-contrast, high-resolution images without staining. It is the oldest and simplest type of microscope that creates an image by altering the wavelengths of light rays passing through the specimen. Altered wavelength paths are created using an annular stop in the condenser. The annular stop produces a hollow cone of...
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相关实验视频

Updated: Jun 10, 2025

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
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大规模的高精度和高效率的相板加工.

Guanhua Wang1, Zhaoxiang Liu2, Lvbin Song1

  • 1State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.

Nanomaterials (Basel, Switzerland)
|October 15, 2024
PubMed
概括

研究人员开发了一种使用秒激光光刻和等离子蚀刻来创建石英相板的新方法. 这种高效的工艺使成本效益高,定制的光学射元件的批量生产成为可能.

关键词:
弗雷尼尔阶段板是什么意思衍射光学元件的光学元素是不同的.五秒激光微机加工 五秒激光微机加工摄影光刻法 (photolithography) 是一种光刻法.

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科学领域:

  • 光学和光子学 在光学和光子学.
  • 材料科学 材料科学 材料科学
  • 纳米技术 纳米技术

背景情况:

  • 分散光学元件 (DOE) 在各种光学应用中至关重要.
  • 对于高性能DOE的高效和成本效益的制造方法有需求.
  • 多层相板需要精确的制造技术.

研究的目的:

  • 开发一种高效,精确的方法,在石英基板上制造多功能,多层次的相板.
  • 为了证明开发的系统生产弗雷内尔透镜和轴子相板的能力.
  • 评估降低生产成本的潜力,并使定制大量生产DOE.

主要方法:

  • 使用基于多边形扫描仪的秒激光光刻系统进行高速,高分辨率的图案写作.
  • 集成的感应合放电等离子反应离子蚀刻 (ICP-RIE),用于精确的深度控制和边缘定义.
  • 采用无限视野 (IFOV) 处理来直接写在大型晶圆上.

主要成果:

  • 实现了5m/s的femtosecond激光光刻光扫描速度和15cm2/h的准备效率.
  • 确保了100nm以下的覆盖层对齐精度和500nm的写作分辨率.
  • 控制的ICP-RIE蚀刻深度误差在±5nm以内,面罩到面罩边缘误差在1μm以下.
  • 制造的8级弗雷尼尔透镜和轴子相板,具有>93%的衍射效率.
  • 在6英寸晶圆上演示了各种相板面罩的一次性直接写作准备.

结论:

  • 联合的秒激光光刻和ICP-RIE技术为生产石英相板提供了一种高效准确的方法.
  • 开发的系统有助于直接编写定制衍射光学元件,降低生产成本.
  • 预计这种方法将促进定制批量生产石英基板衍射光学元件.