超紧的双通道集成CO2红外气体传感器
Liyang Feng1,2, Yanxiang Liu1, Yi Wang1
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China.
Microsystems & nanoengineering
|October 21, 2024
概括
一个新的超紧的二氧化碳 (CO2) 传感器使可穿戴呼吸监测. 这种小型,低功耗的设备在温度方面提供了高精度,并改善了对湿度的抵抗力,用于实时生理追踪.
科学领域:
- 传感器技术 传感器技术
- 生物医学工程 生物医学工程
- 呼吸系统监测 呼吸系统监测
背景情况:
- 呼气中的二氧化碳度是生理状态的重要指标,对重症患者至关重要.
- 目前的呼吸系统气体分析仪是重和耗电密集的,阻碍了活跃个体的可穿戴应用.
- 现有的二氧化碳传感器面临着干扰,灵敏度,尺寸和可穿戴设备的功耗等挑战.
研究的目的:
- 开发一种超紧且低功耗的二氧化碳 (CO2) 传感器,用于可穿戴呼吸监测.
- 克服现有传感器的局限性,包括尺寸,功耗,干扰和灵敏度.
- 为了提高传感器性能,可靠地实时跟踪生理条件.
主要方法:
- 在光学气体室内集成了一个微电机械系统发射器和热探测器.
- 实现了传热控制,以减少功耗和环境温度的影响.
- 采用双通道设计,以提高耐湿性,并优化光学合与振幅修剪网络,以提高灵敏度.
主要成果:
- 开发了一个超紧的传感器,尺寸为12mm x 6mm x 4mm.
- 在广泛的温度范围 (-20°C至50°C) 中,读取误差为<4%,功耗最小 (~33mW).
- 证明了快速响应 (10秒@1Hz),恢复时间,以及出色的耐湿性,稳定性和可重复性.
结论:
- 开发的超紧型CO2传感器满足了可穿戴呼吸监测的关键要求.
- 传感器的小尺寸,低功耗和强大的性能使其适合跟踪活跃的个人.
- 这项技术在推进非侵入性实时生理监测方面具有重大潜力.
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