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在热应力的影响下,MEMS薄膜设备参数的变化

Xiao Wen^1,2, Jinchuan Chen^1,2, Ruiwen Liu³

¹School of Information Engineering, Southwest University of Science and Technology (SWUST), 59 Qinglong Road, Mianyang 621010, China.

|October 26, 2024

概括

热应力显著影响薄膜结构的MEMS设备. 这项研究表明,重复的热负荷会导致薄膜变形并降低共振频率,可能导致设备故障.

科学领域:

材料科学材料科学材料科学
机械工程机械工程
半导体物理半导体物理

背景情况:

在微电子机械系统 (MEMS) 中,薄膜结构对于支,增强和绝缘至关重要.
微观尺寸放大了MEMS参数的灵敏度和对热应激的性能.
了解热应力效应对于MEMS设备的可靠性至关重要.

研究的目的:

研究热应力对MEMS设备中多层薄膜结构的变形和共振频率的影响.
分析应力度区域,并预测热循环下潜在的故障机制.
为改善MEMS设备设计和可靠性提供参考值.

主要方法:

用多层薄膜结构制造Pirani标尺样本.
使用不同温度 (-55°C,25°C,125°C) 的稳态和瞬态分析进行有限元素建模 (FEM).
实验性热应力测试,涉及温度循环和共振频率和表面变形的测量.

主要成果:

金 (Pt) 紧端梁被确定为应力度区域.
在重复的热负荷下观察到的悬臂梁的周期性Z方向运动.
观察到悬浮膜腔和共振频率的下降趋势,这表明降解.
由于累积的热应力,可能导致紧固端梁断裂.

结论:

热应力显著改变了MEMS设备中薄膜结构的机械参数.
FEM模拟和实验结果为增强MEMS设备设计提供了关键数据.
解决热应力影响对于提高MEMS设备的长期可靠性和性能至关重要.

关键词:

在MEMS MEMS中使用.变形变形的情况可靠性的可靠性一个共振频率的共振频率.热应力是一种热应力.薄膜薄膜是一种薄膜.

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