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相关实验视频

Updated: Jun 9, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
11:44

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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关于多物理驱动的MEMS安全和武装设备的研究

Xinyu Fan1, Tengjiang Hu1, Yifei Wang2

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Micromachines
|October 26, 2024
PubMed
概括

本研究介绍了一种新的微电子机械系统 (MEMS) 安全和武装 (S&A) 装置. 多物理驱动的MEMS S&A设备通过紧的设计和高过载阻力实现了可靠的武装.

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科学领域:

  • 武器系统工程 武器系统工程
  • 微电子机械系统 (MEMS) 是指微电子机械系统.
  • 多物理现场驱动设备.

背景情况:

  • 安全和武装 (S&A) 设备对于武器系统能量传输至关重要,影响安全,可靠性和损坏.
  • 微电子机械系统 (MEMS) 为S&A设备提供了小型化,功能集成和智能功能方面的优势.

研究的目的:

  • 设计和验证一个新的多物理场驱动的MEMS S&A设备.
  • 通过协调机制,实现安全和武装国家之间可靠的切换.
  • 为了评估设备在各种条件下的性能,包括超载电阻.

主要方法:

  • 一个MEMS S&A设备的设计,集成逆转,旋转和电热机制,用于多物理武装.
  • 有限元模拟以确定解锁条件和单个机制的过载阻力.
  • 使用SOI和氧化晶片制造芯片,然后进行包装.
  • 实验测试用于验证工作条件和超载能力.

主要成果:

  • 集成的S&A设备为状态切换产生1毫米的位移.
  • 模拟提供了关键解锁条件和超载阻力数据.
  • 制造的MEMS S&A设备,尺寸为10 mm × 10 mm × 1.5 mm,工作顺利.
关键词:
在MEMS MEMS中使用.由多物理驱动的多物理驱动安全和武装 (S&A) 装置.

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相关实验视频

Last Updated: Jun 9, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
11:44

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

10.3K
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  • 该设备成功地承受了25,000g的超负荷,11V和8000rpm.
  • 结论:

    • 拟议的多物理场驱动的MEMS S&A设备展示了有效的功能和状态切换.
    • 紧的MEMS S&A设备具有出色的过载阻力,对于武器系统的安全性和可靠性至关重要.
    • 这种设计代表了智能,小型化的S&A设备技术的重大进步.