开发一个紧的NDIR CO2气体传感器用于便携式气体分析仪
Maosen Xu1,2,3, Wei Tian3, Yuzhe Lin3
1College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao 266590, China.
Micromachines
|October 26, 2024
概括
一个新的,紧的非散射红外 (NDIR) 二氧化碳 (CO2) 气体传感器被开发用于便携式设备. 这种高精度的NDIR传感器为CO2检测提供了更高的可靠性和稳定性.
科学领域:
- 传感器技术 传感器技术
- 红外光谱学 红外光谱学
- MEMS 设备 MEMS 设备
背景情况:
- 非散射红外 (NDIR) 技术对于二氧化碳 (CO2) 检测至关重要.
- 现有的NDIR传感器对于便携式应用来说往往太大了.
- 高精度和小型化的CO2传感器在各种应用中都很受欢迎.
研究的目的:
- 为便携式设备开发一个紧且高精度的NDIR气体传感器.
- 优化光学系统和气体电池以提高性能.
- 为了减少传感器大小,同时保持或提高检测分辨率.
主要方法:
- 使用了MEMS红外发射器和带有光学过器的热探测器.
- 设计和优化了一种双圆形镜像光学系统,以实现高光学合效率 (高达54%).
- 进行了传感器设计的光学和热学模拟,并采用了先进的气体电池结构和调节电路以减少噪声.
主要成果:
- 开发了一个小型的NDIR传感器 (20毫米×10毫米×4毫米),比传统传感器小85%,具有同等分辨率.
- 实现了高灵敏度 (15μV/ppm),低检测极限 (90ppm) 和分辨率 (30ppm).
- 证明了基线噪声的降低,提高了可靠性和低功耗 (总共6.5mW,最大90mW).
结论:
- 开发的NDIR传感器适用于便携式,高精度的CO2检测.
- 通过优化光学设计和系统集成,成功实现了小型化和性能增强.
- 该传感器为下一代便携式气体传感应用提供了一个有前途的解决方案.
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