控制一个微电机系统的快速方向镜与输入成型算法
Jiapeng Hou1,2, Haoxiang Li1,2, Lei Qian1,2
1School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
Micromachines
|October 26, 2024
概括
本研究介绍了微电机系统 (MEMS) 快速转向镜 (FSM) 的新型控制算法. 该算法显著减少了超越和结算时间,提高了FSM的稳定性和带宽,以便更快地进行角度调整.
科学领域:
- 工程 工程师 工程师 工程师
- 材料科学 材料科学 材料科学
- 控制系统 控制系统
背景情况:
- 微电机系统 (MEMS) 为像快速转向镜 (FSM) 这样的设备提供了尺寸和质量的优势.
- 提高MEMS-FSM在开环控制中的性能对于需要精确和快速角调整的应用至关重要.
研究的目的:
- 引入和评估一个新的电磁驱动MEMS-FSM在开环模式下运行的控制算法.
- 通过信号成型来提高MEMS-FSM的稳定性,速度和工作带宽.
主要方法:
- 开发了一个控制算法,通过配合系统的传输函数来塑造输入信号.
- 修改了系统的步骤响应,以最大限度地减少 overshoot 和减少结算时间.
- 在电磁驱动的MEMS-FSM上实现并测试了算法.
主要成果:
- 实现了85.65%的信号超标降低.
- 将沉时间从84毫秒缩短到0.4毫秒.
- 将MEMS-FSM系统的工作带宽增加到2500 Hz.
结论:
- 拟议的控制算法有效地提高了MEMS-FSM的性能.
- 该算法可以实现更快的角度调整和更好的稳定性,使MEMS-FSM更适合苛刻的应用.
- 经过实验验证,超标,结算时间和带宽的显著改进得到了验证.
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