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Updated: Jul 6, 2026

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微和纳米通道制造新兴技术的彻底审查:局限性,应用和比较

Koosha Karimi1, Ali Fardoost1, Nikhil Mhatre1

  • 1Department of Electrical and Computer Engineering, Rutgers University, Piscataway, NJ 08854, USA.

Micromachines
|October 26, 2024
PubMed
概括

综述了先进的微型和纳米通道制造方法,重点介绍了用于精密应用的3D打印和激光微加工等技术. 创新解决了可扩展性和成本问题,影响了未来的微流体和纳米流体.

关键词:
通过3D打印打印3D打印.电子束 lithography 电子束 lithography 电子束 lithography 电子束 lithography 电子束 lithography 电子束聚焦的离子束.注塑成型的注射成型是什么激光微加工 激光微加工微型数控机器人微型数控机器人微频道就是微频道.纳米通道的使用摄影光刻法 (photolithography) 是一种光刻法.软石版印刷是一种软石版印刷.湿/干蚀刻 湿/干蚀刻

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