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Updated: May 5, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Published on: February 27, 2013

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综述:用于衍射格的激光干扰刻字及其在编码器和光谱仪中的应用

Linbin Luo1, Shuonan Shan1, Xinghui Li1,2

  • 1Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.

Sensors (Basel, Switzerland)
|October 26, 2024
PubMed
概括

网格制造技术的进步,特别是激光干扰光刻技术,使得光谱分析和生物医学成像等应用的精确制造成为可能. 这些技术推动了光学仪器的小型化,并增强了高精度测量系统.

关键词:
编码器编码器的编码器网格干涉测量是指干涉测量的网格.格子光谱仪的格子光谱仪.感谢 感谢 感谢 感谢 感谢激光干扰光刻法,激光干扰光刻法.

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