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传输深度和横向分辨率的参数依赖基库奇衍射

Glenn C Sneddon¹, Patrick W Trimby², Levi Tegg¹

¹School of Aerospace, Mechanical and Mechatronic Engineering, University of Sydney, Camperdown, NSW 2006, Australia; Australian Centre for Microscopy and Microanalysis, University of Sydney, Camperdown, NSW 2006, Australia.

Ultramicroscopy

|October 26, 2024

概括

传输基库契衍射 (TKD) 的空间分辨率对实验条件敏感. 这项研究量化了深度和横向分辨率极限,揭示了高分辨率材料表征的最佳参数.

科学领域:

材料科学材料科学材料科学
晶体学晶体学是指结晶学.
电子显微镜电子显微镜

背景情况:

传输基库奇衍射 (TKD) 是一个强大的技术,用于纳米级晶体分析.
了解TKD的空间分辨率极限对于准确的材料表征至关重要.
实验参数显著影响TKD空间分辨率.

研究的目的:

系统地研究TKD空间分辨率对关键实验参数的依赖性.
为了确定各种金属材料中TKD的深度和侧面分辨率极限.
确定最佳的实验条件,以实现最高的空间分辨率.

主要方法:

使用双层粗粒/纳米晶体样本来评估深度分辨率.
采用Kikuchi图案的数字图像相关性跨谷物边界用于横向分辨率测量.
多种参数包括原子号,加速电压,样品的回倾和厚度.

主要成果:

在30kV的深度分辨率下,到达的Al,Cu和Pt分别为80,32和14nm.
深度分辨率随着样本反向倾斜的增加而降低,随着加速电压的降低而略有改善.
在41nm的Al样本中,在30keV的30keV时,在没有反向的情况下,获得了6nm的最佳侧面分辨率;随着厚度和反向的增加,侧面分辨率恶化.

结论:

在TKD中的空间分辨率高度依赖于样品厚度,后倾和材料特性.
高侧分辨率的最佳条件涉及薄样本,没有反向倾斜,以及特定的加速电压.
结果为优化纳米级材料分析的TKD实验提供了关键指导.

关键词:

深度分辨率的深度分辨率是什么空间分辨率的空间分辨率在TKDD上.t-EBSD的EBSD是什么意思

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