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Updated: Jun 9, 2025

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
10:40

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

Published on: April 8, 2018

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高性能和几乎没有唤醒的Hf0.5Zr0.5O2铁电容器通过中间层策略实现,具有BEOL兼容性

Yin-Chi Liu1,2, Gen-Ran Xie2, Ji-Ning Yang2

  • 1Shaoxin Laboratory, Shaoxing, Zhejiang 312000, People's Republic of China.

Nanotechnology
|October 28, 2024
PubMed
概括

研究人员使用中层 (ML) 策略优化了铁电电容器. 一个ZrO2 ML显著提高了Hf0.5Zr0.5O2 (HZO) 薄膜中的铁电和可靠性,同时最大限度地减少了唤醒效应.

关键词:
ZrO2 中间层 ZrO2 中间层线的后端是线的后端.低场运行低场运行剩余的极化是残留的极化唤醒免费免费的唤醒

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Chemical Synthesis of Porous Barium Titanate Thin Film and Thermal Stabilization of Ferroelectric Phase by Porosity-Induced Strain08:00

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