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使用参数对称性破坏的非线性微机械传感器的灵敏度增强

Yutao Xu¹, Qiqi Yang¹, Jiahao Song¹

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.

Microsystems & nanoengineering

|October 29, 2024

概括

研究人员通过跟踪-节点分叉处的频率变化来提高MEMS力传感器的灵敏度. 这种新方法显著提高了共振传感器的灵敏度,为高性能力检测提供了一种新的方法.

科学领域:

非线性动力学是一种非线性动力学.
微电子机械系统 (MEMS) 是一种微电子机械系统.
传感器技术传感器技术

背景情况:

传统的共振传感器依赖于线性频率转移进行操作.
现有的MEMS力传感器在灵敏度和性能方面存在局限性.
在共振器中非线性现象为增强传感能力提供了潜力.

研究的目的:

调查和利用非线性动态,特别是-节点分叉,以增强MEMS力感应.
探索参数驱动的微机械共振器中的双歇斯底里现象.
提出和验证一种基于在分叉处的频率转移的新型传感方案.

主要方法:

一个参数驱动的微机械共振器的理论分析和实验研究.
研究由内在的非线性和外部驱动引起的双重歇斯底里现象.
监测频率在参数隔离分支上的结分叉处发生变化.

主要成果:

由于对称性破坏和相位相互作用,在频率响应中表现出双重歇斯底里.
通过跟踪靠近-节点分叉的频率转移,实现了显著的强力灵敏度增强.
通过使用顶部结分叉的频率验证了一个新的传感方案,在MEMS充电传感器中达到39.5ppm/fC的灵敏度.

结论:

在-节点分叉处跟踪剧烈的频率变化提供了一种途径,可以大大提高MEMS力传感器的灵敏度.
拟议的传感方案显著超过了当前最先进的共振电荷传感器的性能.
这项工作引入了一个新的机制,用于开发高度敏感的力传感器.

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