桥梁压电和静电效应:一个新的压电-MEMS杆/滚轮陀螺仪,偏差不稳定性低于10°/h
Zhenxiang Qi1,2, Bowen Wang1,2, Zhaoyang Zhai1,2
1The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China.
Microsystems & nanoengineering
|October 30, 2024
概括
这项研究介绍了一种新的压电微电机系统 (Piezo-MEMS) 陀螺仪,该陀螺仪集成了压电和静电效应. 它实现了静电模式匹配,显著提高了灵敏度,并减少了调度/滚动测量的偏差不稳定性.
科学领域:
- 微电机系统 (MEMS) 是指微电机系统.
- 惯性传感器 惯性传感器
- 压电和静电转导的压电和静电转导.
背景情况:
- 传统的Piezo-MEMS陀螺仪在灵敏度和调范围方面面临限制,原因是触控幅度和拉入风险之间的权衡.
- 在使用静电调的压电陀螺仪中实现模式匹配一直是一个重大挑战.
研究的目的:
- 提出和演示一个新的Piezo-MEMS杆/滚筒陀螺仪,该陀螺仪集成了压电和静电效应.
- 为了首次实现压电陀螺仪的静电模式匹配操作.
- 为了克服调范围和线性执行范围之间的权衡.
主要方法:
- 压电驱动 (平面外模式) 和静电频率调节 (平面内感觉模式) 的协同集成.
- 使用直角OOP和IP模式来防止振幅限制.
- 将静电修剪应用于IP感知模式,以精确匹配频率.
主要成果:
- 在66V调电压下,通过将频率分割从171Hz降低到0.1Hz,提高了167倍的灵敏度.
- 在模式匹配条件下,达到0.41°/√h的角度随机步行 (ARW) 和8.85°/h的偏移不稳定性 (BI).
- 与模式不匹配条件相比,在ARW和BI分别报告了68倍和301倍的改进.
结论:
- 开发的Piezo-MEMS陀螺仪成功实现了静电模式匹配,显著提高了性能.
- 该BI的性能可与高性能曲率陀螺仪相提并论,其附加的好处是成本较低和实时频率控制.
- 这项工作为高性能,具有成本效益的俯冲/滚动惯性传感提供了有前途的解决方案.
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