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Updated: Jun 9, 2025

Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles

Published on: July 5, 2016

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测试低光束能量电子激发X射线微分析的精度,使用能量分散光谱学

Dale E Newbury1, Nicholas W M Ritchie1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-8370 USA.

Journal of materials science
|October 30, 2024
PubMed
概括

使用5keV的能量分散光谱法 (EDS) 实现了电子激发X射线微分析的高精度. 对于39个元素,超过98%的元素分析结果在±5%的相对偏差范围内,其中82%在±2%内.

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