评估对孤立的有限3D目标建模错误的影响
Mark-Alexander Henn1, Bryan M Barnes1, Hui Zhou1
1Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.
概括
本研究探讨了光学3D纳米结构计量学,重点关注关键维度 (CD) 测量精度. 研究人员从二维建模中识别出错误,并建议实验设置以提高这种常见简化的有效性.
科学领域:
- 计量学 计量学 计量学
- 纳米技术 纳米技术
- 光学科学 光学科学
背景情况:
- 光学3D纳米结构计量学使用基于模型的方法来确定子波长临界维度 (CD).
- 精确测量纳米尺度特征对于先进的制造和研究至关重要.
研究的目的:
- 评估从内部测量目标中获得关键CD和形状参数的方法.
- 调查模型简化对测量精度的影响.
主要方法:
- 使用基于模型的计量方法与物理模型和模拟.
- 将模拟输出与实际测量数据进行比较,以改进模型输入参数.
- 通过将3D纳米结构简化为2D模型来分析引入的系统错误.
主要成果:
- 在3D纳米结构的2D建模中发现了系统性错误,特别是对于较短的特征.
- 展示了这些错误如何影响模型与测量数据的匹配.
- 模拟结果强调了考虑3D效果的必要性.
结论:
- 将3D纳米结构简化为2D模型引入了光学计量学中的系统错误.
- 特定的实验设置,包括照明数值光圈和焦距,可以提高2D近似的有效性.
- 在纳米结构计量学中,平衡模型准确性和计算效率仍然是一个关键挑战.
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