3D

Mark-Alexander Henn1, Bryan M Barnes1, Hui Zhou1

  • 1Engineering Physics Division, National Institute of Standards and Technology, 100 Bureau Drive MS 8212, Gaithersburg, MD, USA 20899-8212.

Journal of micro/nanolithography, MEMS, and MOEMS : JM3
|October 31, 2024
PubMed
概括

本研究探讨了光学3D纳米结构计量学,重点关注关键维度 (CD) 测量精度. 研究人员从二维建模中识别出错误,并建议实验设置以提高这种常见简化的有效性.