相关实验视频

Updated: Jun 8, 2025

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
08:58

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid

Published on: December 2, 2022

2.9K

对尖端宽度校准的一致性和长期稳定性的多种仪器评估,用于关键维度原子力显微镜

Ronald G Dixson1, Ndubuisi G Orji1

  • 1National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899-8212.

Journal of micro/nanolithography, MEMS, and MOEMS : JM3
|November 1, 2024
PubMed
概括

临界维度原子力显微镜 (CD-AFM) 尖端宽度标准显示在10年内稳定. 基于传输电子显微镜 (TEM) 测量的参考校准,尽管偶尔会损坏或需要清理,但仍然保持一致.

关键词:
这是一个CD-AFM.线宽计量学 线宽计量学标准 标准 标准 标准 标准可以追溯的可追溯性.

更多相关视频

Near Simultaneous Laser Scanning Confocal and Atomic Force Microscopy Conpokal on Live Cells09:20

Near Simultaneous Laser Scanning Confocal and Atomic Force Microscopy Conpokal on Live Cells

Published on: August 11, 2020

6.8K
Quantitative Hardness Measurement by Instrumented AFM-indentation08:21

Quantitative Hardness Measurement by Instrumented AFM-indentation

Published on: November 22, 2016

9.6K

相关概念视频

Atomic Force Microscopy01:08

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...
3.3K