实时纠正全角微型外共振器陀螺仪在静电控制中的增强非线性
Sheng Yu1, Jiangkun Sun2, Yongmeng Zhang1
1National University of Defense Technology, Changsha, 410073, China.
Microsystems & nanoengineering
|November 4, 2024
概括
微电子机械系统 (MEMS) 陀螺仪在更大的振幅上表现出非线性效应,影响性能. 这项研究引入了一种实时校正方法,以减轻这些非线性,显著提高陀螺仪的精度和稳定性.
科学领域:
- 在MEMS陀螺仪技术方面,
- 微共振器中的非线性动力学
- 惯性传感器是一种惯性传感器.
背景情况:
- MEMS陀螺镜提供了极好的成本,尺寸,重量和功率 (CSWaP) 优势,推动了研究.
- 振动幅度的增加会提高信号噪声比 (SNR),但会带来有害的非线性效应.
- 了解和减轻这些非线性对于提高MEMS陀螺仪性能至关重要.
研究的目的:
- 为了研究一般的非线性机制,特别是驱动增益非线性,在平行板电容MEMS陀螺仪中.
- 开发和验证一个实时校正方法,用于静电驱动增益非线性.
- 为了量化微共振器陀螺仪 (MSRG) 在应用校正后的性能改进.
主要方法:
- 开发了一个理论模型来分析执行增益非线性及其对角度依赖偏差的影响.
- 在微型共振器陀螺仪 (MSRG) 上进行实验,以验证理论预测.
- 实施了基于电容检测信号在线参数估计的实时增益修改技术.
主要成果:
- 演算增强非线性被证明会导致控制力合,并引入第四阶角度依赖偏差.
- 拟议的实时校正方法将第四阶角度依赖偏差降低了95%以上 (从0.003°/s到<0.0001°/s).
- 偏差不稳定性 (BI) 提高了3.5倍 (从0.101°/h到0.029°/h),尺度因子非线性 (SFN) 减少了一个数量级 (2.02 ppm到0.21 ppm).
结论:
- 驱动增强非线性是影响MEMS陀螺仪性能的一个重要因素,特别是视角依赖偏差.
- 开发的实时校正方法有效地线性化静电驱动,提高陀螺仪的准确性和稳定性.
- 这种方法为改善全角MSRG在各种操作条件中的性能提供了实际解决方案.
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