一种新的双倍倍增区域方法,用于在标准CMOS技术中设计高灵敏度和广谱SPAD
Utku Karaca1, Ekin Kizilkan2, Claudio Bruschini2
1Advanced Quantum Architecture Laboratory (AQUA), Ecole Polytechnique Fédérale de Lausanne (EPFL), 2002, Neuchâtel, Switzerland. utku.karaca@epfl.ch.
Scientific reports
|November 7, 2024
概括
研究人员开发了一种用于单光子雪崩二极管 (SPAD) 的新技术,以提高更广泛光谱的灵敏度. 这项创新提高了SPAD传感器性能,用于各种光检测应用.
科学领域:
- 光子学和光电学和光电子学.
- 半导体设备物理 半导体设备物理
背景情况:
- 单光子雪崩二极管 (SPAD) 对于敏感的光检测至关重要.
- 目前的SPAD设计在广泛的波长范围内实现均灵敏度方面存在局限性.
- 应用越来越需要能够在可见光和近红外光谱中有效运行的SPAD.
研究的目的:
- 引入一种新的SPAD设计,在广的波长频谱中提高灵敏度.
- 克服现有的SPAD技术的光谱限制.
- 为了提高基于SPAD的传感器的性能,用于多光谱应用.
主要方法:
- 一个新的SPAD架构被设计和制造.
- 第二个繁殖区域被整合到SPAD的枯竭区域中.
- 设备性能在各种波长和过度偏差条件下进行了表征.
主要成果:
- 制造的SPAD显示了500nm的峰值光子检测概率 (PDP) 为78%.
- 在更长的波长中保持了显著的灵敏度,在850nm时,PDP为25.5%,波长为850nm.
- 该设备表现出低标准化噪声 (3.7 cps/μm2) 和 165 ps (FWHM) 的定时动在 517 nm.
结论:
- 拟议的SPAD设计有效地扩大了光谱灵敏度范围.
- 集成的第二个乘法区域是实现广谱响应的关键.
- 这一进步使得基于SPAD的传感解决方案更为通用,可用于各种光谱应用.
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