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Updated: Jul 11, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
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在LiNbO3/SiC上的高性能LL-SAW共振器中,通过引入超薄的中间氧化物层来进行带边调制

Juxing He1, Shibin Zhang1, Pengcheng Zheng1

  • 1State Key Laboratory of Materials for Integrated Circuits,Shanghai Institute of Microsystem and Information Technology, Shanghai 200050, China; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Science, Beijing 100190, China.

Ultrasonics
|November 8, 2024
PubMed
概括

研究人员改进了高频声学过器,通过在碳化设备上的酸酸上添加中间氧化物层. 这提高了纵向泄漏表面声波 (LL-SAW) 共振器的质量因子 (Q),以获得更好的移动通信过器.

关键词:
频段调制频段调制 频段调制高频移动通信设备高频移动通信设备在碳化 (LiNbO(3) /SiC) 上的酸.纵向泄漏表面声波 (LL-SAW) 是一种声波.这是一个共振器共振器.

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