概括
整合金属绝缘体和金属等离子吸收器显著增强了CMOS微波计. 这提高了用于先进成像应用的红外探测能力.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 光学是什么?光学是什么?光学是什么?
背景情况:
- 由于温度计层的红外吸收率较低,CMOS微波计面临一些局限性.
- 提高光学检测能力对于实际的微波仪应用至关重要.
研究的目的:
- 为了提高CMOS电阻型微博仪的检测能力.
- 为了证明整合金属绝缘体金属 (MIM) 等离子吸收器的有效性.
主要方法:
- 将Al/SiO2 MIM等离子体吸收器集成到标准的CMOS微博计中.
- 数字模拟和分析传播表面等离子体 (PSP) 和局部表面等离子体 (LSP) 共振.
- 微博仪表表现的实验性表征.
主要成果:
- 在7-13微米波长范围内,检测能力 (D*) 得到了64%的改善.
- 最大检测能力达到了2.46 × 10^9厘米Hz^1/2/W在9.5μm.
- 在30μA的工作电流下实现了最佳性能.
结论:
- MIM等离子体吸收剂有效地增加了微波计中的IR吸收.
- 这种整合为超灵敏,经济高效的红外成像提供了途径.
- 开发的微波仪显示了对先进传感的显著性能提升.
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