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灵活的超导电线,用于与低温探测器和读出布料集成

Galen O'Neil¹, Daniel Swetz¹, Randy Doriese¹

¹National Institute of Standards and Technology, Boulder, CO, USA.

Journal of low temperature physics

|November 14, 2024

概括

我们开发了一种用于在薄上制造柔性超导电线的新方法,称为SOI flex. 这种技术非常适合先进的低温探测器,需要高密度的布线.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
物理物理学物理

背景情况:

超导灵活电线对于先进的电子应用至关重要.
现有的方法在密度和基质兼容性方面存在局限性.
在绝缘体 (SOI) 技术为新型电子元件提供了一个有前途的平台.

研究的目的:

引入一种用于在薄基板上制造高密度超导灵活电线的新方法.
为了描述制造的电线的超导特性.
探索这项技术在低温探测器应用中的潜力.

主要方法:

将超导材料 (Mo,Nb,Al) 沉积在在绝缘体 (SOI) 晶圆上.
选择性地蚀刻SOI晶圆的处理层,以创建一个薄的设备层.
曲稀释的设备层以形成柔性电线.
测量超导过渡温度和临界电流.

主要成果:

在薄上成功制造了高密度超导灵活电线 (SOI flex).
证明了 (Mo), (Nb) 和 (Al) 的超导特性 (过渡温度,临界电流).
观察了应力和应变对和的超导特性的影响.

结论:

SOI flex提供了一种可行的方法,用于创建适合低温探测器应用的柔性超导电线.
该技术允许在柔性基板上高密度集成超导电路.
了解机械应力和应变的影响对于优化曲SOI柔装置的性能至关重要.

关键词:

合金合金是一种临界电流的临界电流低温产生的冷物质.合金是一种合金.尼奥比是一种.是一种,是一种.超导体是一种超导体.

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