用深紫外线激光光线对的激光辅助场蒸发
Severin Jakob1, Andrea Fazi1, Mattias Thuvander1
1Department of Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden.
概括
使用深紫外线激光的染色尺度原子探针断层扫描显示,高激光能量低估了氧含量. 低激光能量低于1 pJ对于Cr2O3.3中的精确氧气测量至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 表面科学是一门学科.
- 分析化学 分析化学
背景情况:
- (Cr2O3) 尺度在高温氧化过程中至关重要.
- 精确的Cr2O3化学成分分析对于了解材料降解至关重要.
- 原子探头断层扫描 (APT) 提供了高分辨率的化学分析,但需要仔细的参数优化.
研究的目的:
- 为了研究深紫外线激光能量对原子探头断层扫描分析染色尺度的影响.
- 确定最佳的激光能量参数,以精确测量Cr2O3.3中的氧含量.
- 评估检测速率和温度对染色体APT分析的影响.
主要方法:
- 准备用于APT的 (Cr2O3) 尺度样本.
- 使用258nm波长深紫外线激光器进行场蒸发.
- 激光能量 (0.0390 pJ),检测速率和温度的系统变化.
- 在针标本上同时进行电压和激光脉冲.
主要成果:
- 在广泛的激光能量范围内实现了Cr2O3的平稳蒸发.
- 高激光能量 (>1 pJ) 导致氧含量显著低估.
- 激光能量低于1 pJ,氧含量测量接近预期的60%,最佳结果为58%.
结论:
- 激光能量是染色尺度APT分析中的一个关键参数.
- 低激光能量对于精确量化Cr2O3.3.中的氧气至关重要.
- 优化的APT参数,特别是低激光能量,使保护性氧化物的可靠化学分析成为可能.
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