关于SRIM对离子范围的预测
A F Gurbich1, P S Prusachenko1, T L Bobrovskiy1
1Institute for Physics and Power Engineering, Bondarenko sq. 1, 249033, Obninsk, Russian Federation.
概括
这项研究测量了铁和中的离子范围,发现SRIM-2013的预测太高了. 经过修改的TRIM-98计算准确匹配了实验性离子范围数据.
科学领域:
- 材料科学 材料科学 材料科学
- 核物理 核物理 核物理
- 离子植入装置 离子植入装置
背景情况:
- 了解材料中的离子范围对于诸如离子植入等应用至关重要.
- 准确预测离子范围对于优化材料修饰过程至关重要.
研究的目的:
- 通过实验确定铁 (Fe) 和 (Mo) 中 (Ni) 离子的范围.
- 将实验性离子范围数据与SRIM-2013和TRIM-98模拟软件的预测进行比较.
- 为了验证或完善现有的离子运输模型.
主要方法:
- 在Fe和Mo样本中植入离子.
- 使用核反应共振分析对植入的离子进行深度分析.
- 将实验数据与SRIM-2013和修改后的TRIM-98模拟进行比较.
主要成果:
- 确定了Fe和Mo中的实验离子范围.
- 发现SRIM-2013对离子范围的预测被严重高估了.
- 对辐射增强扩散进行调整的TRIM-98计算显示与实验结果有很好的一致性.
结论:
- SRIM-2013高估了Fe和Mo中的离子的范围.
- 经过修改的TRIM-98,结合辐射增强扩散,为离子范围预测提供了更准确的模型.
- 实验验证对于完善离子运输模拟工具至关重要.
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