概括
新型波导电网格天线 (WGA) 为固态光检测和距离测定 (LiDAR) 提供超清晰的视野. 这些设备有望提供高分辨率的LiDAR系统,可减少光束分歧.
科学领域:
- 光子学和光学工程 光子学和光学工程
- 半导体设备 半导体设备
- 激光雷达技术 (LiDAR) 是一种技术.
背景情况:
- 光学相位阵列 (OPA) 在固态光检测和距离测定 (LiDAR) 中对芯片规模的光束转向至关重要.
- 波导网格天线 (WGA) 是OPA的关键组件,需要低损耗,高效率和大光圈以获得最佳性能.
- 在OPA中实现近光差异和高分辨率需要先进的WGA设计.
研究的目的:
- 为增强的LiDAR应用引入基于脊波导的新型WGA.
- 设计和制造具有超清晰瞬时视野 (IFOV) 的WGA.
- 调查这些WGA在损失,光束分歧和排放效率方面的性能.
主要方法:
- 脊凸WGA (RCC-WGA) 和脊凸WGA (RCV-WGA) 的设计,利用脊区域两侧的弱模式场分布.
- 在连续体 (L-BIC) 中实现横向准束状态,以最大限度地减少侧向散射并提高排放效率.
- 在在绝缘体 (SOI) 平台上制造WGA,具有220nm设备层和与造厂兼容的蚀刻.
主要成果:
- 在1550nm波长下,RCC-WGA的测量传播损失低至2.64dB/mm,RCV-WGA的测量传播损失低至2.40dB/mm.
- 在1550nm时实现了0.0195° (RCC-WGA) 和0.0175° (RCV-WGA) 的理论光束分歧.
- 测量在0.0251° (RCC-WGA) 和0.0237° (RCV-WGA) 的实验光束分歧,证明了有效的光束控制.
结论:
- 开发的脊波导WGA表现出低损耗和超低光束分歧,适合高分辨率LiDAR.
- 整合L-BIC进一步提高了排放效率,并抑制了散射.
- 这些WGA对高分辨率固态LiDAR系统的进步充满希望.
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