概括
这项研究引入了一种使用计算机生成全息图 (CGH) 的光学表面的新型绝对测试方法. 该技术通过将CGH零光学和干扰仪组件的错误分开来实现亚纳米的不确定性.
科学领域:
- 光学计量学是指光学计量学.
- 纳米技术 纳米技术
- 全息影像的使用方法.
背景情况:
- 高精度对于在短波长运行的光学至关重要.
- 对aspheres和自由形体的介面测试依赖于虚光学,如计算机生成全息图 (CGH).
- 测量不确定性往往受到测试波面的精度的限制,受CGH和干扰仪光学的影响.
研究的目的:
- 提出使用CGH零光学测试旋转对称表面的绝对测试方法.
- 通过误差分离,实现明显高于测试波面精度的测量精度.
- 通过实验验证拟议的方法.
主要方法:
- 绝对测试结合了N位置方法和转移旋转方法.
- 在拉斯特扫描的离轴全息图中,假设旋转对称误差微不足道.
- 理论建模和实验验证使用白光干扰测量来描述制造错误.
主要成果:
- 展示一种方法,将波面误差从CGH和传输平面从绝对表面形状中分离出来.
- 实验验证达到亚纳米不确定性.
- 通过全息图结构表征来证实制造错误假设.
结论:
- 拟议的绝对测试方法有效地分离了与CGH零光学相关的错误.
- 对于使用这种技术的旋转对称表面,可以实现亚纳米的不确定性.
- 该方法为高精度的光学表面计量学提供了一条途径.
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