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对于在绝缘体上肋带波导的有效和组折射率提取和横截面尺寸估计

Enge Zhang, Xiaoran Zhu, Lei Zhang

|November 22, 2024

概括

对光子集成电路 (PIC) 进行精确的有效和组折射率 (n_eff,n_g) 在在绝缘体 (SOI) 肋带波导中的测量至关重要. 本研究使用微环共振器 (MRR) 提取这些参数,从而能够精确地评估波导尺寸.

科学领域:

光子学是指光子学的使用方法.
材料科学材料科学材料科学
集成光学集成光学集成光学

背景情况:

准确确定有效 (n_eff) 和群 (n_g) 折射率对于光子集成电路 (PIC) 设计至关重要.
在绝缘体 (SOI) 技术是PIC的关键平台,需要精确的光学属性表征.

研究的目的:

展示一种方法来提取n_eff和n_g的SOI肋带波导.
为了估计这些波导的横截面尺寸,非侵入性地.
通过实验测量来验证提取的尺寸.

主要方法:

使用来自两个赛道微环共振器 (MRR) 的传输光谱,具有不同的周长.
使用提取的n_eff(λ) 来估计波导的横截面尺寸.
将估计的尺寸与扫描传输电子显微镜 (STEM) 分析进行比较.

主要成果:

实现了n_eff和n_g的提取,不确定性约为10-3.
估计的波导尺寸 (宽度,高度,板厚) 与STEM分析 (约. 1% 的差异).
证明了折射率提取和非侵入性维度评估的通用方法.

结论:

拟议的方法可以准确地提取光学波导的参数.
这种技术为描述光子设备提供了一个非侵入性和多功能工具.
该方法适用于各种PIC平台的设计和验证.

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