后置动式Si-to-Si直流MEMS开关用于电源切换应用程序
Abdurrashid Hassan Shuaibu1, Almur A S Rabih1, Yves Blaquière1
1Department of Electrical Engineering, École de Technologie Supérieure, Université du Québec, Montréal, QC H3C 1K3, Canada.
Micromachines
|November 27, 2024
概括
这项研究引入了一种新的DC MEMS开关,使用具有到接触的电热执行器. 该设备实现了低电阻和快速切换,适用于高压应用.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 固态物理 固态物理
- 电气工程 电气工程 电气工程
背景情况:
- 电热驱动器为MEMS应用提供高力和位移.
- 现有的直流MEMS开关在商业流程中面临限制,特别是在电绝缘方面.
- 实现可靠的电绝缘对于防止直流MEMS开关干扰至关重要.
研究的目的:
- 为直流MEMS开关提供雪佛龙型电热执行器.
- 展示SiO2/Al薄膜用于电绝缘和Al加热器用于执行的使用.
- 为了评估Si-to-Si接触电阻和切换性能.
主要方法:
- 在Si光束上制造DC MEMS开关,使用圆型电热驱动器,在Si光束上使用SiO2/Al薄膜.
- 使用薄膜Al加热器用于执行器驱动和SiO2用于电绝缘.
- 通过应用电流和测量电压来测量Si-to-Si接触电阻,并评估开关速度.
主要成果:
- 为Si-to-Si接口实现了150 Ω的低接触电阻.
- 证明开关速度小于5ms,执行电压为1.2V,电流为205mA.
- 开关的故障电压高达350V,确保了稳定性.
结论:
- 开发的具有电热驱动和Si-to-Si接触的DC MEMS开关对于可重新配置的导电线路是有效的.
- 该设计的电绝缘和低接触电阻使其适用于高压和恶劣环境.
- 接触力,温度和蚀刻角度等因素极大地影响开关性能和寿命.
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