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Pressure Gauges01:20

Pressure Gauges

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Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...
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Measurement of Fluid Pressure01:16

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Fluid pressure is commonly measured using devices called manometers, which rely on liquid columns to indicate pressure differences. The height of a liquid column in a manometer reflects the pressure exerted by the fluid, providing a simple yet effective means of measurement. Different types of manometers serve specific purposes based on their configurations and the type of fluids involved.
A basic form of manometer is the piezometer, a vertical tube open at the top and filled with the same...
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Study of Siphon Breaker Experiment and Simulation for a Research Reactor
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一个高性能微差压传感器

Xutao Fan1, Lei Wang2, Songsong Zhang1,2,3,4

  • 1School of Microelectronics, Shanghai University, Shanghai 201800, China.

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|November 27, 2024
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概括
此摘要是机器生成的。

开发了一种新的微差压传感器 (MDPS) 用于生物医学导管. 这种小型化的MEMS传感器提供了高性能和低成本,使先进的医疗器械应用成为可能.

关键词:
微差压传感器 (MDPS) 是一种微差压传感器.微型电机系统 (MEMS) 是一种微型电机系统.在绝缘体上的 (SOI)小尺寸的小尺寸小尺寸的小尺寸

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科学领域:

  • 微电子机械系统 (MEMS) 是一种微电子机械系统.
  • 生物医学工程 生物医学工程
  • 传感器技术 传感器技术

背景情况:

  • 微差压传感器 (MDPS) 对MEMS应用至关重要.
  • 微型传感器对于先进的生物医学导管至关重要,特别是在低法语 (Fr) 应用中.
  • 现有的传感器在满足5Fr中央静脉压力 (CVP) 监测导管等设备的严格尺寸和性能要求时经常面临挑战.

研究的目的:

  • 设计和制造一个高性能,小型化的基于在绝缘体 (SOI) 的MDPS用于微压检测.
  • 评估传感器的性能特征,包括灵敏度,非线性,精度和热稳定性.
  • 评估开发的MDPS在生物医学导管中集成的潜力.

主要方法:

  • 使用8英寸MEMS工艺设计和制造基于SOI的MDPS.
  • 在室温和高温至160°C的0-1kPa压力范围内的传感器性能表征.
  • 评估关键性能指标:灵敏度,非线性,精度,零输出温度系数 (TCO) 和温度灵敏度系数 (TCS).

主要成果:

  • 制造出来的MDPS的尺寸为1mm × 1mm × 0.4mm.
  • 在室温下达到3.401mV/V/kPa的灵敏度,非线性为0.376%FS,整体精度为0.59%FS.
  • 经过证明,在高达160°C的温度下稳定运行,TCO为0.093%FS/°C,TCS为-0.144%FS/°C.

结论:

  • 基于SOI的小型MDPS满足了将其集成到生物医学导管中的要求很高的尺寸和性能标准.
  • 传感器的高精度,灵敏度和热稳定性使其适合CVP监控等关键应用.
  • 使用标准的8英寸MEMS工艺确保了批量生产的成本效益,为医疗器械更广泛采用铺平了道路.