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相关概念视频

Inductively Coupled Plasma Atomic Emission Spectroscopy: Principle01:19

Inductively Coupled Plasma Atomic Emission Spectroscopy: Principle

525
Inductively coupled plasma (ICP) is the most widely used plasma source in atomic emission spectroscopy (AES), also known as Inductively Coupled Plasma Optical Emission Spectroscopy (ICP-OES). The ICP source, or torch, consists of three concentric quartz tubes with argon gas flowing through them. A spark from a Tesla coil initiates the ionization of argon, generating a high-temperature plasma.
The ions and electrons produced interact with the fluctuating magnetic field created by a water-cooled...
525
Atomic Fluorescence Spectroscopy01:29

Atomic Fluorescence Spectroscopy

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Atomic fluorescence spectroscopy (AFS) is an analytical technique that involves the electronic transitions of atoms in a flame, furnace, or plasma being excited by electromagnetic (EM) radiation. When these atoms absorb energy, they become excited and subsequently release energy as they return to their original state. This emitted light, or "fluorescence," is observed at a right angle to the incident beam. Both absorption and emission processes transpire at distinct wavelengths, which...
247

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相关实验视频

Updated: Jun 6, 2025

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
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Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

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用于半导体加工的高温碳等离子体的数据驱动分析.

Sung Kyu Jang1, Woosung Lee1, Ga In Choi1

  • 1Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea.

Sensors (Basel, Switzerland)
|November 27, 2024
PubMed
概括
此摘要是机器生成的。

先进的半导体制造使用无形碳层 (ACL) 面膜,但碳污染需要等离子体清洗. 这项研究揭示了在高温等离子体条件下COF3的形成,为优化ACL过程提供了见解.

关键词:
无形碳层是一种无形的碳层.一级加死亡时间 (FOPDT) 模型.基于的血含有.气体温度气体温度气体温度非负矩阵因数分解 (NMF)主要组成部分分析 (PCA)过程优化优化过程优化飞行时间质谱 (ToF-MS)

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相关实验视频

Last Updated: Jun 6, 2025

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科学领域:

  • 材料科学 材料科学 材料科学
  • 等离子体物理学的物理学
  • 化学工程是化学工程的重要组成部分.

背景情况:

  • 无形碳层 (ACL) 面膜对于3D-NAND和DRAM制造中的高比例蚀刻至关重要.
  • 在ACL沉积室中的碳污染需要有效的等离子体清洗方法.

研究的目的:

  • 在ACL沉积室的高温等离子体清洗过程中分析气体物种变化.
  • 了解工艺条件对气体动态的影响,并确定关键反应途径.

主要方法:

  • 使用高温电感合等离子体 (ICP) 系统.
  • 使用飞行时间质谱仪 (ToF-MS) 进行气体物种分析.
  • 应用主要组件分析 (PCA) 和非负矩阵因数分解 (NMF) 用于数据解释.
  • 使用第一顺序加死亡时间 (FOPDT) 模型量化动态气体信号变化.

主要成果:

  • 确定了参与等离子体清洁过程的关键气体物种.
  • 在高气体温度和等离子体功率水平下观察到COF3的形成.
  • 在特定的高温条件下表明了额外的反应途径的存在.

结论:

  • 提供了对ACL清洗中高温等离子体相互作用的全面了解.
  • 为优化半导体制造中的ACL流程提出了新的战略建议.
  • 突出了COF3形成在流程优化中的重要性.