概括
这项研究引入了一种高效的曲线光学近距离校正 (OPC) 方法,使用非均的B-spline曲线和节点去除. 新方法显著提高了优化速度,并减少了面具数据大小,用于高级光刻.
科学领域:
- 计算式 lithography 的使用方法.
- 半导体制造业 半导体制造业
- 面具设计 面具设计
背景情况:
- 与曼哈顿面具相比,曲线面具提供了优越的光刻成像保真性.
- 光学近距离校正 (OPC) 对于设计面具轮在计算 lithography 中至关重要.
- 现有的曲线式OPC方法是计算密集型的,并且产生冗余数据.
研究的目的:
- 开发一种更有效的曲线式OPC方法.
- 为了减少计算复杂性和掩盖文件大小.
- 解决曲线面罩设计中的数据冗余问题.
主要方法:
- 使用非均的B-spline曲线来表示曲线面具结构.
- 实施节点删除过程以消除冗余数据.
- 在曲线OPC框架内应用这些技术.
主要成果:
- 与现有方法相比,证明了优化效率更高.
- 实现了显著的数据减少 (DRON率).
- 在模拟中验证了非均的B-spline曲线和节点去除的有效性.
结论:
- 拟议的曲线OPC方法提高了计算效率.
- 节点去除有效地解决了曲线面罩设计中的数据冗余.
- 这种方法为先进的半导体光刻画提供了一个有前途的解决方案.
相关概念视频
Curvilinear Motion: Rectangular Components
416
Curvilinear motion characterizes the movement of a particle or object along a curved path, notably evident when envisioning a car navigating a winding road. If the car starts at point A, its position vector is established within a fixed frame of reference, where the ratio of the position vector to its magnitude signifies the unit vector pointing in the position vector's direction.
As the car advances, its position evolves over time. Quantifying the car's velocity involves computing the...
As the car advances, its position evolves over time. Quantifying the car's velocity involves computing the...
416
Curvilinear Motion: Polar Coordinates
347
In polar coordinates, the motion of a particle follows a curvilinear path. The radial coordinate symbolized as 'r,' extends outward from a fixed origin to the particle, while the angular coordinate, 'θ,' measured in radians, represents the counterclockwise angle between a fixed reference line and the radial line connecting the origin to the particle.
The particle's location is described using a unit vector along the radial direction. Deriving the particle's position...
The particle's location is described using a unit vector along the radial direction. Deriving the particle's position...
347
Distance Corrections
25
To achieve precise distance measurements, especially in surveying and construction, certain corrections must be applied to account for potential sources of error like the standardization errors, temperature variations, and slope adjustments.Standardization error emerges when measurement equipment undergoes changes, such as wear, repairs, or weather impacts. To address this, surveyors compare the equipment’s readings to a standard. This process identifies any deviation that might lead to...
25
Calibration Curves: Linear Least Squares
1.2K
A calibration curve is a plot of the instrument's response against a series of known concentrations of a substance. This curve is used to set the instrument response levels, using the substance and its concentrations as standards. Alternatively, or additionally, an equation is fitted to the calibration curve plot and subsequently used to calculate the unknown concentrations of other samples reliably.
For data that follow a straight line, the standard method for fitting is the linear...
For data that follow a straight line, the standard method for fitting is the linear...
1.2K
Curvilinear Motion: Normal and Tangential Components
380
When a car traverses a curved road, its motion can be elucidated by breaking it down into tangential and normal components. The car-centric coordinates attached to the vehicle move with it.
The positive direction of the t-axis aligns with the increasing position of the car along the curved path, denoted by the unit vector ut. Simultaneously, the n-axis, perpendicular to the t-axis, dissects the curved path into differential arc segments, each forming the arc of a circle with a radius of...
The positive direction of the t-axis aligns with the increasing position of the car along the curved path, denoted by the unit vector ut. Simultaneously, the n-axis, perpendicular to the t-axis, dissects the curved path into differential arc segments, each forming the arc of a circle with a radius of...
380
Sight Distance in a Vertical Curve
35
Sight distance on vertical curves is critical in roadway design. It ensures drivers can see far enough ahead to identify and respond to hazards effectively. This directly impacts safety, driver comfort, and the overall efficiency of the transportation network.Vertical curves are classified into crest and sag curves based on their geometry. For crest curves, sight distance is determined by the line of sight between a driver's eye and a small object on the road's surface. Design parameters for...
35


