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由TiO_x启用的对称无多剂Si太阳能电池纳米层:对双极载体选择性的深入研究

Takuya Matsui^1,2, Shohei Fukaya^1,2, Shona McNab³

¹Renewable Energy Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8568, Japan.

Advanced science (Weinheim, Baden-Wurttemberg, Germany)

|November 28, 2024

概括

无形氧化 (TiO_x) 层使得太阳能电池能够有效地提取电荷. 通过原子层沉积 (ALD) 量身定制TiO_x,可以在没有外部兴奋剂的情况下创建选择性接触,从而提高太阳能电池的性能.

科学领域:

材料科学材料科学材料科学
太阳能光伏发电是如何实现的
半导体物理半导体物理

背景情况:

高效的太阳能电池依赖于使用专门的接触结构有效地提取电荷.
当前的技术往往依赖于选择性接触的外部兴奋剂,增加了复杂性.

研究的目的:

为了证明一种新的孔和电子选择性被动接触,用于晶太阳能电池.
为了利用单一的材料,无形氧化 (TiO_x),没有外部兴奋剂.
为了阐明/金属氧化物界面上的电荷生成机制.

主要方法:

无形氧化 (TiO_x) 层 (≈5 nm) 的原子层沉积 (ALD).
通过氧化过程和Ti前体选择量身定制TiO_x选择性.
现场和现场的X射线光电子光谱 (XPS) 用于接口分析.
沉积后的氧化形成SiO_y纳米层.

主要成果:

仅使用无形TiO_x证明了双极载体选择性.
孔选择性TiO_x在n-Si中诱导了显著的带曲 (Φ≈0.7 eV),形成了一个p型倒置层.
电子选择性TiO_x诱导了较小的带曲 (Φ<0.35 eV).
确定了TiO_x中的负固定电荷作为选择性的来源,取决于ALD参数.
证实了含SiO_y纳米层在化学被动化中的关键作用.

结论:

无形TiO_x为太阳能电池中的选择性接触提供了一种多功能,单一材料的解决方案.
选择性机制与TiO_x内的可控制的固定电荷有关.
接口工程,包括SiO_y形成,是高性能被动化和电荷提取的关键.

关键词:

原子层沉积的原子层沉积.运营商选择性的选择性通过被动化接触接触.是一种.太阳能电池是一个太阳能电池.氧化是一种氧化.

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