电极弹性模块作为铁电哈夫尼氧化薄膜中封闭效应的主导因素
Megan K Lenox1, Md Rafiqul Islam2, Md Shafkat Bin Hoque2
1Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
ACS applied materials & interfaces
|December 3, 2024
概括
电极弹性模量,而不是其热膨胀,通过增强封闭效应来稳定哈夫尼亚薄膜中的铁电. 这一发现指导了为提高铁电设备性能而选择电极材料.
科学领域:
- 材料科学 材料科学 材料科学
- 固态物理 固态物理
- 纳米技术 纳米技术
背景情况:
- 基于哈夫尼亚的薄膜中的铁电对于先进的电子技术至关重要.
- 以前的研究表明,电极和哈夫尼亚之间的热膨胀系数 (CTE) 不匹配稳定了铁电相.
- 基板机械性能的影响往往被忽视.
研究的目的:
- 调和以前关于铁电相稳定机制的发现中的差异.
- 为了确定负责哈夫尼亚薄膜中"封顶效应"的主要因素.
- 为选择具有增强铁电性能的电极材料提供指导方针.
主要方法:
- 使用各种金属电极 (M = Pt, TaN, Ir, W, Ru) 制造的 Pt/M/TaN/Hf0.5Zr0.5O2/TaN/Si 装置.
- 使用sin2方法进行X射线衍射测量,以量化Hf0.5Zr0.5O2层中的双轴应力.
- 电极特性 (弹性模量,CTE),Hf0.5Zr0.5O2双轴应力和残余极化之间的相关性分析.
主要成果:
- 在双轴应力,残余极化和电极的弹性模量之间观察到强烈的相关性.
- 在电极的CTE,Hf0.5Zr0.5O2双轴应力和残余极化之间发现了一个弱相关性.
- 更高的弹性模块电极加剧了封闭效应,限制了平面外扩张,促进了平面内极化.
结论:
- 顶部电极的弹性模量,而不是它的CTE,是稳定哈夫尼亚薄膜中的铁电相的主要因素.
- 增强的弹性模量导致铁电相稳定性和极化大小的增加.
- 这项研究为选择电极材料提供了关键的见解,以优化用于微电子应用的铁电哈夫尼亚,如非挥发性记忆.
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