Xiangbo Meng1, Jeffrey W Elam2, Sean Barry3

  • 1Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, United States of America.

Nanotechnology
|December 11, 2024
PubMed
概括

本系列强调了原子和分子层沉积 (ALD和MLD) 的最新进展,展示了新的前体,工艺和应用. 它提供了对金属ALD表面化学和灵活电子的ALD/MLD的洞察.