一个半导体设备的设计TCADAS工具和65nm常规浮门MOS晶体管的案例研究
Thinh Dang Cong1,2, Trang Hoang1,2
1Department of Electronics Engineering, Ho Chi Minh City University of Technology (HCMUT), Ho Chi Minh City, 72506, Viet Nam.
Heliyon
|December 13, 2024
概括
本研究介绍了技术计算机辅助设计自动模拟 (TCADAS) 工具,用于简化半导体设备的虚拟制造. TCADAS自动化复杂的流程,减少手工工作和模拟时间,用于诸如浮式门MOS晶体管等技术.
科学领域:
- 半导体设备物理 半导体设备物理
- 计算材料科学科学 计算材料科学
- 电气工程 电气工程
背景情况:
- 虚拟制造对于现代半导体开发至关重要.
- 现有的工具往往涉及复杂的输入和漫长的模拟时间.
- 设计和模拟过程的自动化对于效率至关重要.
研究的目的:
- 为半导体设备提出虚拟制造方法.
- 设计和介绍技术计算机辅助设计自动模拟 (TCADAS) 工具.
- 为了自动化复杂的模拟工作流程和输出提取.
主要方法:
- 使用 Python 和 TCAD Silvaco 实用程序 (Athena,Atlas,DevEdit3D) 开发了 TCADAS 工具.
- 从输入到3D结构的完整虚拟制造流程的实现.
- 设备特征和提取关键性能参数.
主要成果:
- 成功演示了一种65nm常规浮门MOS晶体管虚拟制造.
- 输入复杂性的自动化,手工工作和模拟运行时间.
- 提取关键参数,包括内存窗口,开启/关闭比率,网关合比率 (GCR) 和速度.
结论:
- 该TCADAS工具显著提高了半导体设备虚拟制造和模拟的效率.
- 这种方法简化了复杂设备的研究,如浮式门MOS晶体管.
- TCADAS为设备特性和性能分析提供了一个强大的平台.
相关概念视频
MOSFET: Enhancement Mode
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Enhancement-mode MOSFETs are pivotal components in electronics, distinguished by their capacity to act as highly efficient switches. They are part of the larger family of metal-oxide Semiconductor Field-Effect Transistors (MOSFETs). They are available in two types: p-channel and n-channel, each tailored to specific polarity operations.
In their basic form, enhancement-mode MOSFETs are typically non-conductive when the gate-source voltage (Vgs) is zero. This default 'off' state means no...
In their basic form, enhancement-mode MOSFETs are typically non-conductive when the gate-source voltage (Vgs) is zero. This default 'off' state means no...
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Characteristics of MOSFET
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Metal-oxide-semiconductor field-effect Transistors, or MOSFETs, play a critical role in electronic circuits. They are primarily utilized for amplifying and switching signals.
Various vital parameters influence their functionality, which is crucial for theory and electronics applications. First, channel dimensions, precisely length, and width, are pivotal. The size of these channels affects the transistor's ability to carry current and switching speeds; shorter channels typically enable...
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MOSFET
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MOS Capacitor
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A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
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MOSFET: Depletion Mode
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Depletion-mode MOSFETs represent a unique subset of MOSFET technology, functioning fundamentally differently from their enhancement-mode counterparts. Unlike enhancement MOSFETs, which require a positive gate-source voltage (Vgs) to turn on, depletion-mode MOSFETs are inherently conductive and "normally on" devices.
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